Silicon production with a fluidized bed reactor integrated into a siemens-type process
A fluidized bed reactor and a Siemens reactor are used to produce polycrystalline silicon. The process includes feeding the vent gas from the Siemens reactor as a feed gas to the fluidized bed reactor.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A fluidized bed reactor and a Siemens reactor are used to produce polycrystalline silicon. The process includes feeding the vent gas from the Siemens reactor as a feed gas to the fluidized bed reactor. |
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