Phase plate, imaging method, and electron microscope
The invention concerns a phase plate for electron optical imaging, wherein the zero beam is phase-shifted in order to obtain an image with optimum contrast through interference with the diffracted electron beams. The shading of diffracted electron beams is kept to a minimum and shading that cannot b...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The invention concerns a phase plate for electron optical imaging, wherein the zero beam is phase-shifted in order to obtain an image with optimum contrast through interference with the diffracted electron beams. The shading of diffracted electron beams is kept to a minimum and shading that cannot be reconstructed from the obtained image data is prevented. This is achieved in that the electrode is designed as a shielded conductor, which is disposed to extend from a mounting in a substantially radial direction towards the area of the zero beam, wherein the shielded conductor has an end in front of the area of the zero beam such that a field is formed between the conductor and the shielding surrounding it, which overlaps this area. The invention also concerns an imaging method for complete reconstruction of the image and an electron microscope which is provided with the phase plate. |
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