Semiconductor structure including mixed rare earth oxide formed on silicon
A method (and resultant structure) of forming a semiconductor structure, includes forming a mixed rare earth oxide on silicon. The mixed rare earth oxide is lattice-matched to silicon.
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| creator | Bojarczuk, Jr, Nestor Alexander Buchanan, Douglas Andrew Guha, Supratik Narayanan, Vijay Ragnarsson, Lars-Ake |
| description | A method (and resultant structure) of forming a semiconductor structure, includes forming a mixed rare earth oxide on silicon. The mixed rare earth oxide is lattice-matched to silicon. |
| format | Patent |
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| title | Semiconductor structure including mixed rare earth oxide formed on silicon |
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