Systems, methods, and apparatus of a low conductance silicon micro-leak for mass spectrometer inlet

Systems, methods, and apparatus of a low conductance silicon micro-leak for mass spectrometer inlet

Systems, methods and apparatus are provided through which in some embodiments a mass spectrometer micro-leak includes a number of channels fabricated by semiconductor processing tools and that includes a number of inlet holes that provide access to the channels.

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Bibliographische Detailangaben
Hauptverfasser: Harpold, Dan N, Niemann, Hasso B, Jamieson, Brian G, Lynch, Bernard A
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Systems, methods and apparatus are provided through which in some embodiments a mass spectrometer micro-leak includes a number of channels fabricated by semiconductor processing tools and that includes a number of inlet holes that provide access to the channels.