Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation

A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-...

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Bibliographische Detailangaben
Hauptverfasser: Johs, Blaine D, Green, Steven E, Herzinger, Craig M, Meyer, Duane E, Liphardt, Martin M
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.