Ultrasonic bonding apparatus

An ultrasonic bonding apparatus for manufacturing an electronic device that includes a substrate, an electronic component, and an underfill filled between the electronic component and the substrate includes a head that includes a tool surface configured to mount the electronic component, a wiping un...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Masuda, Yasuyuki, Ozaki, Yukio, Matsueda, Jun, Ikura, Kazuyuki, Kobayashi, Taizan, Kasuga, Toshinori
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An ultrasonic bonding apparatus for manufacturing an electronic device that includes a substrate, an electronic component, and an underfill filled between the electronic component and the substrate includes a head that includes a tool surface configured to mount the electronic component, a wiping unit configured to wipe out pre-cured underfill that has adhered to the tool surface of the head, by using a wiping member on a wiping table, an ultrasonic bonding unit configured to ultrasonically bond the electronic component with the substrate and to press the head against the wiping member on the wiping table, a detector configured to detect a first pressure applied between the wiping member on the wiping table and the tool surface when the wiping unit provides wiping, and a controller configured to control a second pressure applied by the ultrasonic bonding unit, based on a detection result by the detector.