Methods and apparatus for inspecting an object

Methods and apparatus for inspecting an object

A method for inspecting an object includes emitting light from at least one of a liquid crystal display (LCD) device and a liquid crystal on silicon (LCOS) device, phase-shifting light emitted from at least one of the LCD device and the LCOS device, projecting the phase-shifted light onto a surface...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Hu, Oingyang, Hamilton, Donald Wagner, Harding, Kevin George, Ross, Joseph Benjamin
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method for inspecting an object includes emitting light from at least one of a liquid crystal display (LCD) device and a liquid crystal on silicon (LCOS) device, phase-shifting light emitted from at least one of the LCD device and the LCOS device, projecting the phase-shifted light onto a surface of an object, receiving light reflected from the object surface with an imaging sensor, and analyzing the light received by the imaging sensor to facilitate inspecting at least a portion of the object.