Sleeve cone quality measurement system and method

A metrology system for measuring a cone angle, a cone straightness, and a cone quality of a sample and method of using the metrology system are disclosed. The system includes a rotary stage, one or more workpiece fixtures that hold the samples in the rotary stage, and a number of different sized mea...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Mysore, Ananda V, Gonzalez, Steve G, Berry, II, Reid E, Leuthold, Hans
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A metrology system for measuring a cone angle, a cone straightness, and a cone quality of a sample and method of using the metrology system are disclosed. The system includes a rotary stage, one or more workpiece fixtures that hold the samples in the rotary stage, and a number of different sized measurement devices. The measuring devices are positioned next to the rotary stage and measure the samples using contact. The rotary stage is free to rotate when the measuring devices are in a non-measuring state. The invention also includes a processor that collects data from the measurement devices and calculates the cone angle, the cone straightness, and the cone quality of each sample based on the data.