Micromechanical sensor for measuring the mass flow rate in accordance with the Coriolis principle

a, bIn a micromechanical sensor for measuring a mass flow rate in accordance with the Coriolis principle, two line sections are mounted in a suspension means such that they can oscillate, as a result of which they can be caused to oscillate in phase opposition (essential for the measuring principle). A spacer layer is provided between the layers forming the line sections, the spacer layer ensuring that there is a space between the line sections in the quiescent state. Oscillation of the line sections in phase opposition only becomes possible at all as a result of this since this prevents collision of the line sections as they approach one another.