Method and device for the operation of a plasma device

A method for the operation of a plasma device is described in which particles are arranged in a plasma, wherein a generation of electric travelling waves is provided, under whose effective action the particles in the plasma device perform a directed movement to at least one pre-determined collection...

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Bibliographische Detailangaben
Hauptverfasser: Morfill, Gregor, Konopka, Uwe, Thomas, Hubertus M, Jacob, Wolfgang, Annaratone, Beatrice, Fink, Martin, Sato, Noriyoshi, Shimizu, Tetsuji, Stuffler, Timo
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method for the operation of a plasma device is described in which particles are arranged in a plasma, wherein a generation of electric travelling waves is provided, under whose effective action the particles in the plasma device perform a directed movement to at least one pre-determined collection area (A). A plasma device for carrying out the method is also described.