Edge termination for semiconductor device
A semiconductor device has active region and edge termination region which includes a plurality of floating field regions. Field plates extend in the edge termination region inwards from contact holes towards the active region over a plurality of floating field regions. Pillars may be provided.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A semiconductor device has active region and edge termination region which includes a plurality of floating field regions. Field plates extend in the edge termination region inwards from contact holes towards the active region over a plurality of floating field regions. Pillars may be provided. |
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