Halftone mask and method for making pattern substrate using the halftone mask
A halftone mask includes translucent film patterns for forming a middle gradation area and light blocking film patterns disposed to an entire periphery of the translucent film patterns.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A halftone mask includes translucent film patterns for forming a middle gradation area and light blocking film patterns disposed to an entire periphery of the translucent film patterns. |
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