Inspection apparatus and inspection method
An inspection apparatus includes: a first light source having a first plurality of surface emitting laser elements which emit fundamental waves, respectively; a first illumination optical system configured to illuminate a first plurality of fundamental waves emitted from the first plurality of surfa...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | An inspection apparatus includes: a first light source having a first plurality of surface emitting laser elements which emit fundamental waves, respectively; a first illumination optical system configured to illuminate a first plurality of fundamental waves emitted from the first plurality of surface emitting laser elements on an object to be inspected; and a stage on which the object to be inspected is placed. |
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