Micropump for integrated device for biological analyses
A micropump includes a body of semiconductor material, accommodating fluid-tight chambers, having an internal preset pressure, lower than atmospheric pressure. The fluid-tight chambers, sealed by a diaphragm that can be electrically opened, are selectively openable using a first electrode and second...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A micropump includes a body of semiconductor material, accommodating fluid-tight chambers, having an internal preset pressure, lower than atmospheric pressure. The fluid-tight chambers, sealed by a diaphragm that can be electrically opened, are selectively openable using a first electrode and second electrodes, accommodating between them portions of the diaphragm. |
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