Integrated circuits comprising resistors having different sheet resistances and methods of fabricating the same

The fabrication of integrated circuits comprising resistors having the same structure but different sheet resistances is disclosed herein. In one embodiment, a method of fabricating an integrated circuit comprises: concurrently forming a first resistor laterally spaced from a second resistor above o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Booth, Jr, Roger Allen, Cheng, Kangguo, Hook, Terence B
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The fabrication of integrated circuits comprising resistors having the same structure but different sheet resistances is disclosed herein. In one embodiment, a method of fabricating an integrated circuit comprises: concurrently forming a first resistor laterally spaced from a second resistor above or within a semiconductor substrate, the first and second resistors comprising a doped semiconductive material; depositing a dopant receiving material across the first and second resistors and the semiconductor substrate; removing the dopant receiving material from upon the first resistor while retaining the dopant receiving material upon the second resistor; and annealing the first and second resistors to cause a first sheet resistance of the first resistor to be different from a second sheet resistance of the second resistor.