Reticle pod
A reticle pod, comprising an upper cover having a first accommodating space and a lower cover having a second accommodating space, a third accommodating space being formed after the upper cover and the lower cover close together, wherein the characteristic of the reticle pad is in that: the reticle...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A reticle pod, comprising an upper cover having a first accommodating space and a lower cover having a second accommodating space, a third accommodating space being formed after the upper cover and the lower cover close together, wherein the characteristic of the reticle pad is in that: the reticle pod includes a plurality of supporting pieces respectively and suspendingly disposed at each corner of the inner surfaces of the upper cover and of the lower cover, and two ends of each of the plurality of supporting pieces are respectively connected to two neighboring sides of corner of the inner surface to form a closed sheet body and a gap is formed at the bend of the closed sheet body. |
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