Systems configured to perform a non-contact method for determining a property of a specimen

Systems configured to perform a non-contact method for determining a property of a specimen are provided. One system configured to perform a non-contact method for determining a property of a specimen includes a focused biasing device configured to provide a stimulus to a focused spot on the specime...

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Bibliographische Detailangaben
Hauptverfasser:	Samsavar, Amin, Schmidt, John M, Schierle, Rainer, Horner, Gregory S, Miller, Thomas G, Xu, Zhiwei, Hu, Xiaofeng, Shi, Jianou, Edelstein, Sergio
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	Systems configured to perform a non-contact method for determining a property of a specimen are provided. One system configured to perform a non-contact method for determining a property of a specimen includes a focused biasing device configured to provide a stimulus to a focused spot on the specimen. The system also includes a sensor configured to measure a parameter of a measurement spot on the specimen. The measurement spot overlaps the focused spot. The system further includes a processor configured to determine the property of the specimen from the parameter.