Sacrificial compositions and methods of fabricating a structure using sacrificial compositions

Sacrificial compositions and methods of fabricating a structure using sacrificial compositions

Compositions, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary composition, among others, includes a polymer and a catalytic amount of a negative tone photoinitiator.

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Bibliographische Detailangaben
Hauptverfasser: Kohl, Paul A, Joseph, Paul J, Reed, Hollie K, Bidstrup-Allen, Sue Ann, White, Celesta E, Henderson, Clifford
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Compositions, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary composition, among others, includes a polymer and a catalytic amount of a negative tone photoinitiator.