Diaphragm changing device

Diaphragm changing device

a, b The invention relates to an optical imaging device, in particular an objective for microlithography in the field of EUVL for producing semiconductor components, having a beam path , a plurality of optical elements and a diaphragm device with an adjustable diaphragm opening shape. The diaphragm...

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Hauptverfasser: Bieg, Hermann, Bischoff, Thomas, Nguyen, Uy-Liem, Xalter, Stefan, Will, Marcus, Kwan, Yim-Bum Patrick, Muehlbeyer, Michael
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Sprache:eng
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creator Bieg, Hermann
Bischoff, Thomas
Nguyen, Uy-Liem
Xalter, Stefan
Will, Marcus
Kwan, Yim-Bum Patrick
Muehlbeyer, Michael
description a, b The invention relates to an optical imaging device, in particular an objective for microlithography in the field of EUVL for producing semiconductor components, having a beam path , a plurality of optical elements and a diaphragm device with an adjustable diaphragm opening shape. The diaphragm device has a diaphragm store with a plurality of different diaphragm openings with fixed shapes in each case, which can be introduced into the beam path
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title Diaphragm changing device
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