Diaphragm changing device
a, b The invention relates to an optical imaging device, in particular an objective for microlithography in the field of EUVL for producing semiconductor components, having a beam path , a plurality of optical elements and a diaphragm device with an adjustable diaphragm opening shape. The diaphragm...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | a, b The invention relates to an optical imaging device, in particular an objective for microlithography in the field of EUVL for producing semiconductor components, having a beam path , a plurality of optical elements and a diaphragm device with an adjustable diaphragm opening shape. The diaphragm device has a diaphragm store with a plurality of different diaphragm openings with fixed shapes in each case, which can be introduced into the beam path |
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