Method of manufacturing semiconductor device

A method for manufacturing a semiconductor device includes: a step of forming a via plug erected on an electrically conductive layer, and embedding the via plug in an insulation layer to form a wiring structure; and a step of bonding the wiring structure to a wiring substrate including electronic co...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Fujii, Tomoharu, Oi, Kiyoshi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method for manufacturing a semiconductor device includes: a step of forming a via plug erected on an electrically conductive layer, and embedding the via plug in an insulation layer to form a wiring structure; and a step of bonding the wiring structure to a wiring substrate including electronic components mounted thereon.