Surface treatment system and method
A surface treatment system is disclosed to form a deposition layer at a surface of an object of surface treatment by using a deposition reaction in which an electrode for applying power to form a deposition reaction in the deposition chamber is installed between an inner wall of the deposition chamb...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A surface treatment system is disclosed to form a deposition layer at a surface of an object of surface treatment by using a deposition reaction in which an electrode for applying power to form a deposition reaction in the deposition chamber is installed between an inner wall of the deposition chamber and an object of surface treatment and further includes a cooling unit installed at the inner wall of the deposition chamber facing the electrode and cooling ambient thereof. |
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