Drive unit

A drive unit includes a stage, a first ultrasonic actuator (A) for driving the stage in the X direction, and a second ultrasonic actuator (B) for driving the stage in the Y direction. In driving the stage in only one of the X and Y directions, one of the first and second ultrasonic actuators (A, B)...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Mukae, Hideaki, Adachi, Yusuke
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A drive unit includes a stage, a first ultrasonic actuator (A) for driving the stage in the X direction, and a second ultrasonic actuator (B) for driving the stage in the Y direction. In driving the stage in only one of the X and Y directions, one of the first and second ultrasonic actuators (A, B) corresponding to the one of the directions generates a composite vibration of a longitudinal vibration parallel to a contact surface of the stage and a bending vibration orthogonal to the contact surface, while the other ultrasonic actuator generates only a longitudinal vibration parallel to the contact surface of the stage.