Electrical open/short contact alignment structure for active region vs. gate region

An apparatus for measuring a structural characteristic between a polysilicon shape and a silicon area. The apparatus for measuring a structural characteristic between a polysilicon shape and a silicon area comprises the silicon area, and a plurality of polysilicon shapes each having a unique orienta...

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Bibliographische Detailangaben
Hauptverfasser: Donze, Richard Lee, Erickson, Karl Robert, Hovis, William Paul, Sheet, II, John Edward, Tetzloff, Jon Robert
Format: Patent
Sprache:eng
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Zusammenfassung:An apparatus for measuring a structural characteristic between a polysilicon shape and a silicon area. The apparatus for measuring a structural characteristic between a polysilicon shape and a silicon area comprises the silicon area, and a plurality of polysilicon shapes each having a unique orientation relative to the silicon area wherein each of the polysilicon shapes is formed having an angle less than or equal to a critical angle. The critical angle is an angle at or below which a sidewall spacer no longer is formed on a polysilicon shape, thereby causing the polysilicon shape to short circuit to an underlying portion of the silicon area by way of a silicide bridge.