Plasma generating electrode, plasma generation device, and exhaust gas purifying device
a a a b bA plasma generating electrode of the invention includes at least a pair of electrodes , at least one electrode of the pair of electrodes including a plate-like ceramic body as a dielectric and a plurality of conductive films disposed in the ceramic body and each having a plurality of throug...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | a a a b bA plasma generating electrode of the invention includes at least a pair of electrodes , at least one electrode of the pair of electrodes including a plate-like ceramic body as a dielectric and a plurality of conductive films disposed in the ceramic body and each having a plurality of through-holes formed through the conductive film in its thickness direction in a predetermined arrangement pattern, the through-holes having a cross-sectional shape including an arc shape along a plane perpendicular to the thickness direction, an arrangement pattern of the through-holes formed in at least one conductive film being different from an arrangement pattern of the through-holes formed in the other conductive film . The plasma generating electrode is capable of simultaneously generating different states of plasma upon application of voltage between the pair of electrodes due to the different arrangement patterns of the through-holes in the conductive films |
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