Integrated circuit with fuse programming damage detection

An integrated circuit with an efuse having an efuse link includes a damage detection structure disposed in relation to the efuse so as to detect damage in the IC resulting from programming the efuse. Damage sensing circuitry is optionally included on the IC. Embodiments are used in evaluation wafers...

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Bibliographische Detailangaben
Hauptverfasser: Ang, Boon Yong, Paak, Sunhom, Im, Hsung Jai, Oh, Kwansuhk, Pang, Raymond C
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An integrated circuit with an efuse having an efuse link includes a damage detection structure disposed in relation to the efuse so as to detect damage in the IC resulting from programming the efuse. Damage sensing circuitry is optionally included on the IC. Embodiments are used in evaluation wafers to determine proper efuse fabrication and programming parameters, and in production ICs to identify efuse programming damage that might create a latent defect.