Micro-droplet injection apparatus and injecting process using the same
A micro-droplet injection apparatus and the injecting process using the same are provided for fabricating a micro-element. The apparatus includes an injection module, a moving stage module, an image detection module, and a temperature controlling module. The injection module is provided for injectin...
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Sprache: | eng |
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Zusammenfassung: | A micro-droplet injection apparatus and the injecting process using the same are provided for fabricating a micro-element. The apparatus includes an injection module, a moving stage module, an image detection module, and a temperature controlling module. The injection module is provided for injecting a micro-droplet on a substrate carried on the moving stage module, and the substrate is detected by the image detection module for detecting the relative position and inclined angle between the substrate and a injection head of the injection module. The temperature controlling module is provided for controlling the surface temperature of the substrate, such that the temperature of the substrate and the micro-droplets is balanced, and then the surface flatness of the film plated by micro-droplets is improved. The apparatus operates according to processing requirements of different substrates, achieving a stage multiplex function, and raising operation efficiency. |
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