Ion implantation with a collimator magnet and a neutral filter magnet

Ion implantation with a collimator magnet and a neutral filter magnet

This disclosure describes an ion implanter having a collimator magnet that is configured to shape an ion beam. A first deceleration stage is configured to manipulate energy of the ion beam shaped by the collimator magnet. A neutral filter magnet is configured to filter neutral atoms from the ion bea...

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Bibliographische Detailangaben
Hauptverfasser: Benveniste, Victor M, Campbell, Christopher W, Sinclair, Frank
Format: Patent
Sprache:eng
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Zusammenfassung:This disclosure describes an ion implanter having a collimator magnet that is configured to shape an ion beam. A first deceleration stage is configured to manipulate energy of the ion beam shaped by the collimator magnet. A neutral filter magnet is configured to filter neutral atoms from the ion beam passing through the first deceleration stage.