Piezo resistive pressure sensor

Various embodiments and methods relating to a pressure sensor having a flexure supported piezo resistive sensing element are disclosed.

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Bibliographische Detailangaben
Hauptverfasser:	McKinnell, James C, Nikkel, Eric L, Wu, Jennifer L, Jilani, Adel B
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	Various embodiments and methods relating to a pressure sensor having a flexure supported piezo resistive sensing element are disclosed.