Annular damascene vertical natural capacitor

A method for forming a vertical natural capacitor in an integrated circuit is disclosed. In one embodiment, the method includes forming a first set of concentric conductive annular structures in a first metal layer of an integrated circuit. The first set includes a first electrode and a second elect...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Anderson, Felix Patrick, McDevitt, Thomas Leddy, Stamper, Anthony Kendall
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A method for forming a vertical natural capacitor in an integrated circuit is disclosed. In one embodiment, the method includes forming a first set of concentric conductive annular structures in a first metal layer of an integrated circuit. The first set includes a first electrode and a second electrode. The method further includes forming a second set of concentric conductive annular structures in a second metal layer of the integrated circuit, the second set being substantially axially concentric with the first set. The second set also includes a first electrode and a second electrode. The method includes coupling, using conductive vias, the first electrode of the first set to the first electrode of the second set, and the second electrode of the first set to the second electrode of the second set.