Methods of manufacturing semiconductor memory devices including a vertical channel transistor

Semiconductor memory devices include a semiconductor substrate and a plurality of semiconductor material pillars in a spaced relationship on the semiconductor substrate. Respective surrounding gate electrodes surround ones of the pillars. A first source/drain region is in the semiconductor substrate...

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Bibliographische Detailangaben
Hauptverfasser: Yoon, Jae-man, Park, Dong-gun, Lee, Choong-ho, Yi, Moon-suk, Lee, Chul
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Semiconductor memory devices include a semiconductor substrate and a plurality of semiconductor material pillars in a spaced relationship on the semiconductor substrate. Respective surrounding gate electrodes surround ones of the pillars. A first source/drain region is in the semiconductor substrate between adjacent ones of the pillars and a second source/drain region is in an upper portion of at least one of the adjacent pillars. A buried bit line is in the first source/drain region and electrically coupled to the first source/drain region and a storage node electrode is on the upper portion of the at least one of the adjacent pillars and electrically contacting with the second source/drain region.