Optical proximity correction in raster scan printing based on corner matching templates

Optical proximity correction in raster scan printing based on corner matching templates

Methods and apparatus for correcting defects, such as rounded corners and line end shortening, in patterns formed via lithography are provided. Such defects are compensated for "post-rasterization" by manipulating the grayscale values of pixel maps.

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Bibliographische Detailangaben
Hauptverfasser: Beauchaine, Robert J, Chabreck, Thomas E, Howells, Samuel C, Hubbard, John J, Klatchko, Asher, Pirogovsky, Peter, Teitzel, Robin L
Format: Patent
Sprache:eng
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Zusammenfassung:Methods and apparatus for correcting defects, such as rounded corners and line end shortening, in patterns formed via lithography are provided. Such defects are compensated for "post-rasterization" by manipulating the grayscale values of pixel maps.