Interface for operating and monitoring abatement systems

Method and systems are provided for monitoring and controlling one or more abatement systems. One or more abatement systems may be represented on a display alone with one or more effluent flows from processing tools. A selected effluent flow configuration is received. An interface manifold is contro...

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Hauptverfasser:	Loldj, Youssef A, Crawford, Shaun W
Format:	Patent
Sprache:	eng
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creator	Loldj, Youssef A Crawford, Shaun W
description	Method and systems are provided for monitoring and controlling one or more abatement systems. One or more abatement systems may be represented on a display alone with one or more effluent flows from processing tools. A selected effluent flow configuration is received. An interface manifold is controlled to implement the selected effluent flow configuration. Numerous other aspects are provided.
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title	Interface for operating and monitoring abatement systems
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