Interface for operating and monitoring abatement systems
Method and systems are provided for monitoring and controlling one or more abatement systems. One or more abatement systems may be represented on a display alone with one or more effluent flows from processing tools. A selected effluent flow configuration is received. An interface manifold is contro...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | Method and systems are provided for monitoring and controlling one or more abatement systems. One or more abatement systems may be represented on a display alone with one or more effluent flows from processing tools. A selected effluent flow configuration is received. An interface manifold is controlled to implement the selected effluent flow configuration. Numerous other aspects are provided. |
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