Method of manufacturing semiconductor device

The present invention provides a method for manufacturing a semiconductor device by which the yield of bumps will be increased. First, an insulation layer, a barrier layer, and a seed layer are sequentially formed on a principal surface of a semiconductor substrate. Then, a protection layer is formed to cover the seed layer and the bumps. Next, portions of the protection layer are removed so that portions of the protection layer covering the sidewalls of the bumps are not removed. Next, the principal surface of the semiconductor substrate is supported by the support through a bonding material, and then a back surface of the semiconductor substrate is polished. Next, the back surface of the semiconductor substrate is polished, and the support and the bonding material are removed.