Method of determining physical properties of an optical layer or layer system
0 0 n k The present invention relates to a method of determining physical properties of an optical layer or layer system by means of spectral transmission and/or reflection measurements, whereby in accordance with the spectrum of the transmission and/or reflection measurement, reference values for t...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | 0 0 n k The present invention relates to a method of determining physical properties of an optical layer or layer system by means of spectral transmission and/or reflection measurements, whereby in accordance with the spectrum of the transmission and/or reflection measurement, reference values for the wavelength-dependent refractive indices nand/or extinction coefficients kare chosen from known values or are determined experimentally and the variation that characterizes the layer is described by wavelength-independent variation constants Kand Kfor the refractive indices and extinction coefficients. |
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