Imprint lithography template to facilitate control of liquid movement
The present invention is directed to a template that features a control surface extending from a periphery of a mold toward a recessed surface of the template forming an oblique angle between a portion of the control surface disposed proximate to the periphery.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The present invention is directed to a template that features a control surface extending from a periphery of a mold toward a recessed surface of the template forming an oblique angle between a portion of the control surface disposed proximate to the periphery. |
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