On-wafer test structures for differential signals

A test structure for characterizing integrated circuits on a wafer includes a differential cell outputting a differential mode signal in response to a differential mode input signal. The probe pads of the test structure are arrayed linearly enabling placement of the test structure in a saw street be...

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Bibliographische Detailangaben
Hauptverfasser: Strid, Eric, Campbell, Richard
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A test structure for characterizing integrated circuits on a wafer includes a differential cell outputting a differential mode signal in response to a differential mode input signal. The probe pads of the test structure are arrayed linearly enabling placement of the test structure in a saw street between dies.