Stage apparatus and vision measuring apparatus

A stage apparatus includes a stage glass having on an upper surface a stage surface of a substantially flat plane on which a predetermined workpiece (W) is set, a plane light emitter with a flat plane, which is provided to substantially all over a lower surface of the stage glass and illuminates the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kamiyama, Shuichi, Nishitsuji, Yutaka
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A stage apparatus includes a stage glass having on an upper surface a stage surface of a substantially flat plane on which a predetermined workpiece (W) is set, a plane light emitter with a flat plane, which is provided to substantially all over a lower surface of the stage glass and illuminates the workpiece (W) with contour illumination through the stage glass, and a supporting section, which supports at plurality of points on a lower face side of the plane light emitter and adjusts the flatness of the stage surface by adjusting the height at a plurality of supporting points.