Stage apparatus and vision measuring apparatus
A stage apparatus includes a stage glass having on an upper surface a stage surface of a substantially flat plane on which a predetermined workpiece (W) is set, a plane light emitter with a flat plane, which is provided to substantially all over a lower surface of the stage glass and illuminates the...
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Zusammenfassung: | A stage apparatus includes a stage glass having on an upper surface a stage surface of a substantially flat plane on which a predetermined workpiece (W) is set, a plane light emitter with a flat plane, which is provided to substantially all over a lower surface of the stage glass and illuminates the workpiece (W) with contour illumination through the stage glass, and a supporting section, which supports at plurality of points on a lower face side of the plane light emitter and adjusts the flatness of the stage surface by adjusting the height at a plurality of supporting points. |
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