Method of fabricating a multi-post structures on a substrate

Micromechanical devices having complex multilayer structures and techniques for forming the devices are described.

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Bibliographische Detailangaben
1. Verfasser: Birkmeyer, Jeffrey
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Micromechanical devices having complex multilayer structures and techniques for forming the devices are described.