Lithographic apparatus, device manufacturing method, and device manufactured thereby

Lithographic apparatus, device manufacturing method, and device manufactured thereby

A lithographic projection apparatus includes conduits which supply utilities to components in a vacuum chamber such as object tables and/or associated motors and/or sensors. The conduits are shielded from exposure to the vacuum by conduit conducts having at least the same number of degrees of freedo...

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Bibliographische Detailangaben
Hauptverfasser: Driessen, Johannes Cornelis, Soemers, Hermanus Mathias Joannes Rene, Renkens, Michael Jozefa Mathijs, Bisschops, Theodorus Hubertus Josephus, Vermeulen, Johannes Petrus Martinus Bernardus, Rijken, Antonius Maria
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A lithographic projection apparatus includes conduits which supply utilities to components in a vacuum chamber such as object tables and/or associated motors and/or sensors. The conduits are shielded from exposure to the vacuum by conduit conducts having at least the same number of degrees of freedom as their associated object table.