Probe manufacturing method, probe, and scanning probe microscope

A probe is made by attaching a carbon nanotube to a mounting base end , which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the conductivity of the probe, and strengthen the bonding performance thereof by coating the entire circumference of the nan...

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Bibliographische Detailangaben

Hauptverfasser:	Morimoto, Takafumi, Shinaki, Tooru, Nag'No, Yoshiyuki, Kenbou, Yukio, Kunitomo, Yuuichi, Hiroki, Takenori, Kurenuma, Tooru, Yanagimoto, Hiroaki, Kuroda, Hiroshi, Miwa, Shigeru, Murayama, Ken, Hayashibara, Mitsuo, Hidaka, Kishio, Fujieda, Tadashi
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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