Probe manufacturing method, probe, and scanning probe microscope

A probe is made by attaching a carbon nanotube to a mounting base end , which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the conductivity of the probe, and strengthen the bonding performance thereof by coating the entire circumference of the nan...

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Bibliographische Detailangaben
Hauptverfasser: Morimoto, Takafumi, Shinaki, Tooru, Nag'No, Yoshiyuki, Kenbou, Yukio, Kunitomo, Yuuichi, Hiroki, Takenori, Kurenuma, Tooru, Yanagimoto, Hiroaki, Kuroda, Hiroshi, Miwa, Shigeru, Murayama, Ken, Hayashibara, Mitsuo, Hidaka, Kishio, Fujieda, Tadashi
Format: Patent
Sprache:eng
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Zusammenfassung:A probe is made by attaching a carbon nanotube to a mounting base end , which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the conductivity of the probe, and strengthen the bonding performance thereof by coating the entire circumference of the nanotube and the base with a coating film, rather than coating just one side. The work of mounting the carbon nanotube and mounting base end are performed under observation by a microscope. Further, the carbon contamination film formed by an electron microscope is stripped off at a stage before bonding by the coating film.