Columnar structured material and method of manufacturing the same

A method of manufacturing a dot pattern includes the steps of preparing a structured material composed of a plurality of columnar members containing a first component and a region containing a second component different from the first component surrounding the columnar members, with the structured m...

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Bibliographische Detailangaben
Hauptverfasser: Ogawa, Miki, Miyata, Hirokatsu, Otto, Albrecht, Kuriyama, Akira, Okura, Hiroshi, Den, Tohru, Fukutani, Kazuhiko
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method of manufacturing a dot pattern includes the steps of preparing a structured material composed of a plurality of columnar members containing a first component and a region containing a second component different from the first component surrounding the columnar members, with the structured material being formed by depositing the first component and the second component on a substrate, and removing the columnar members from the structured material to form a porous material having a columnar hole. Additional steps include introducing a mask material into the columnar hole of the porous material to form a dot pattern, and removing the porous material.