Method of using automated test equipment to screen for leakage inducing defects after calibration to intrinsic leakage

The present invention is directed to a method of identifying test devices having excessive leakage current and also includes computer program products that enable the same. The method obtaining background test data using a test routine to measure the leakage current for a set of test devices as a function of a parameter associated with device speed for the device under test. From the test data, a leakage threshold function is defined that correlates leakage current with the parameter associated with device speed. The test routine and the leakage threshold function are then input into an automated testing apparatus configured to execute the test on production or other devices. Devices are tested to determine leakage current over a range of parameter values associated with device speed. The devices are then screened using the leakage threshold function to determine the status of the device.