Probe station with two platens

A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first platen and the second platen positioned above the device under test. A percentage of the top surface of the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Navratil, Peter, Froemke, Brad, Stewart, Craig, Lord, Anthony, Spencer, Jeff, Runbaugh, Scott, Fisher, Gavin, McCann, Pete, Jones, Rod
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first platen and the second platen positioned above the device under test. A percentage of the top surface of the second platen terminating into free space.