Module for mounting a MEMS device

A module for mounting a micro-electromechanical system (MEMS) device includes a base having a first support and a second support. The second support has a support guide feature. The module also includes a bracket attached to the MEMS device. The bracket has a central axis, a first end, and a second...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Chee, Christopher Gregory, Klement, Martin Christopher
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A module for mounting a micro-electromechanical system (MEMS) device includes a base having a first support and a second support. The second support has a support guide feature. The module also includes a bracket attached to the MEMS device. The bracket has a central axis, a first end, and a second end. The second end has a bracket guide feature. The first end is affixed to the first support of the base to form a cantilever arrangement. The support guide feature engages the bracket guide feature to form a sliding joint having a sliding axis substantially parallel to the central axis.