Module for mounting a MEMS device
A module for mounting a micro-electromechanical system (MEMS) device includes a base having a first support and a second support. The second support has a support guide feature. The module also includes a bracket attached to the MEMS device. The bracket has a central axis, a first end, and a second...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A module for mounting a micro-electromechanical system (MEMS) device includes a base having a first support and a second support. The second support has a support guide feature. The module also includes a bracket attached to the MEMS device. The bracket has a central axis, a first end, and a second end. The second end has a bracket guide feature. The first end is affixed to the first support of the base to form a cantilever arrangement. The support guide feature engages the bracket guide feature to form a sliding joint having a sliding axis substantially parallel to the central axis. |
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