Spectrophotometer, ellipsometer, polarimeter and the like systems

Spectrophotometer, ellipsometer, polarimeter and the like systems

Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.

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Bibliographische Detailangaben
Hauptverfasser: Woollam, John A, Green, Steven E, He, Ping, Johs, Blaine D, Herzinger, Craig M, Pfeiffer, Galen L, Guenther, Brian D, Liphardt, Martin M, Cooney, Gerald T
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.