High-stability optical microscope

This invention provides a highly stable optical microscope that prevents drift and makes it possible to record images or take measurements for several hours with accuracy in the order of nanometers. The highly stable optical microscope of this invention includes the support structure that accommodat...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kinoshita, Kazuhiko, Shio, Megumu
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:This invention provides a highly stable optical microscope that prevents drift and makes it possible to record images or take measurements for several hours with accuracy in the order of nanometers. The highly stable optical microscope of this invention includes the support structure that accommodates and supports components including the optical imaging system, straight tube that accommodates and supports components including the optical photometric system, and support structure that accommodates and supports components including the illumination system. These support structures have a hollow pyramid or conical shape with a low center of gravity. The highly stable optical microscope of this invention features the objective lenses, imaging lenses, optical imaging and photometric systems that are mounted, forming a straight line, on the supporting structures that are symmetrical about the optical axis in both shape and mass.